@article{article, title = {{THE EFFECT OF SUBSTRATE-TEMPERATURE ON DEEP STATES IN MBE SILICON}}, url = {{}}, year = {{1987}}, month = {{8}}, author = {{SIDEBOTHAM EC and PEAKER AR and HOPKINSON M and HOUGHTON R and PATEL G and PARKER EHC and WHALL TE}}, volume = {{134}}, journal = {{JOURNAL OF THE ELECTROCHEMICAL SOCIETY}}, issue = {{8B}}, pages = {{C545-C545}}, note = {{Accessed on 2024/12/27}}}